Deposition of MAX phase-containing thin films from a (Ti,Zr)2AlC compound target
Clio Azina, Bensu Tunca, Andrejs Petruhins, Binbin Xin, Melike Yildizhan, Per O. Å. Persson, Jef Vleugels, Konstantina Lambrinou, Johanna Rosén, Per Eklund
Topics & Concepts
Materials scienceMAX phasesIntermetallicSolid solutionSputteringCarbideNucleationThin filmTitaniumTransmission electron microscopyAnalytical Chemistry (journal)MetallurgyMicrostructureCrystallographyNanotechnologyAlloyThermodynamicsChemistryPhysicsChromatographyMXene and MAX Phase MaterialsAluminum Alloys Composites PropertiesAdvanced ceramic materials synthesis