Reaction of BCl3 with H- and Cl-terminated Si(1 0 0) as a pathway for selective, monolayer doping through wet chemistry
Dhamelyz Silva-Quiñones, Chuan He, Robert Butera, George T. Wang, Andrew V. Teplyakov
Topics & Concepts
X-ray photoelectron spectroscopyChemistryMonolayerBoron trichlorideSiliconDopingBoronDensity functional theoryMoleculePhysical chemistryPhotochemistryAnalytical Chemistry (journal)Computational chemistryChemical engineeringOrganic chemistryMaterials scienceOptoelectronicsBiochemistryEngineeringSemiconductor materials and devicesSemiconductor materials and interfacesSilicon Nanostructures and Photoluminescence