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Reaction of BCl3 with H- and Cl-terminated Si(1 0 0) as a pathway for selective, monolayer doping through wet chemistry

Dhamelyz Silva-Quiñones, Chuan He, Robert Butera, George T. Wang, Andrew V. Teplyakov

2020Applied Surface Science32 citationsDOIOpen Access PDF

Topics & Concepts

X-ray photoelectron spectroscopyChemistryMonolayerBoron trichlorideSiliconDopingBoronDensity functional theoryMoleculePhysical chemistryPhotochemistryAnalytical Chemistry (journal)Computational chemistryChemical engineeringOrganic chemistryMaterials scienceOptoelectronicsBiochemistryEngineeringSemiconductor materials and devicesSemiconductor materials and interfacesSilicon Nanostructures and Photoluminescence
Reaction of BCl3 with H- and Cl-terminated Si(1 0 0) as a pathway for selective, monolayer doping through wet chemistry | Litcius