Chemical mechanical polishing for sapphire wafers using a developed slurry
Zhenyu Zhang, Jie Liu, Wei Hu, Lezhen Zhang, Wenxiang Xie, Longxing Liao
Topics & Concepts
SapphireMaterials scienceChemical-mechanical planarizationSlurryX-ray photoelectron spectroscopyPolishingWaferSurface roughnessMicroelectronicsGrindingChemical engineeringNanotechnologyComposite materialOpticsEngineeringPhysicsLaserAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis