Mechanical trimming with focused ion beam for permanent tuning of MEMS dual-mass gyroscope
Alexandra Efimovskaya, Danmeng Wang, Andrei M. Shkel
Topics & Concepts
GyroscopeMaterials scienceMicroelectromechanical systemsPlanarStiffnessTrimmingProof massConcentricVibrating structure gyroscopeActuatorAcousticsOptoelectronicsPhysicsEngineeringComputer scienceMechanical engineeringAerospace engineeringElectrical engineeringComposite materialMathematicsComputer graphics (images)GeometryAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies