Tuning the characteristics of Al2O3 thin films using different pulse configurations: Mid-frequency, high-power impulse magnetron sputtering, and their combination
Marta P. Ferreira, D. Martínez-Martínez, Jean‐Baptiste Chemin, Patrick Choquet
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputteringSputter depositionThin filmCrystallinityAmorphous solidCrystallitePhysical vapor depositionAnalytical Chemistry (journal)Composite materialOptoelectronicsMetallurgyNanotechnologyChemistryCrystallographyChromatographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices