Trajectory dependence of electronic energy-loss straggling at keV ion energies

Abstract

Accurate knowledge of ion energy deposition in materials is imperative for a wealth of scientific and technological applications. Here, the authors measure the energy-loss straggling, i.e., the energy distribution variance of transmitted ions, for $k\phantom{\rule{0}{0ex}}e\phantom{\rule{0}{0ex}}V$ ions of H, He, B, and Si in Si membranes. Straggling exhibits a significant trajectory dependence for all ions. Studying the velocity dependence of electronic energy-loss straggling and calculating transport cross sections, the authors obtain strong evidence for contributions of electron-promotion events to ion energy loss at low velocities.

Topics & Concepts