Enhanced electrical conductivity and reduced work function of β-Ga2O3 thin films by hydrogen plasma treatment
Yi‐Ming Shi, Junhua Meng, Jingren Chen, Rui Wu, Lisheng Zhang, Ji Jiang, Jinxiang Deng, Zhigang Yin, Xingwang Zhang
Topics & Concepts
Kelvin probe force microscopeWork functionMaterials scienceElectrical resistivity and conductivityThin filmDopingPhotoluminescenceConductive atomic force microscopyOptoelectronicsConductivityNanotechnologyPlasmaAnalytical Chemistry (journal)Condensed matter physicsChemistryAtomic force microscopyElectrical engineeringPhysicsPhysical chemistryEngineeringChromatographyLayer (electronics)Quantum mechanicsGa2O3 and related materialsZnO doping and propertiesElectronic and Structural Properties of Oxides