Ultralow-dielectric-constant amorphous boron nitride
Seokmo Hong, Chang‐Seok Lee, Min‐Hyun Lee, Yeongdong Lee, Kyung Yeol, Gwangwoo Kim, Seong In Yoon, Kyuwook Ihm, Ki-Jeong Kim, Tae Joo Shin, Sang Won Kim, Eun‐chae Jeon, Hansol Jeon, Ju‐Young Kim, Hyung-ik Lee, Zonghoon Lee, Aleandro Antidormi, Stephan Roche, Manish Chhowalla, Hyeon‐Jin Shin, Hyeon Suk Shin
Topics & Concepts
Materials scienceDielectricAmorphous solidBoron nitrideOptoelectronicsSilicon nitrideMiniaturizationCapacitanceNanotechnologySemiconductorSiliconElectrodeChemistryPhysical chemistryOrganic chemistrySemiconductor materials and devicesCopper Interconnects and ReliabilityDiamond and Carbon-based Materials Research