Post oxidation in improving the Schottky-gate MgZnO/ZnO heterojunction field-effect transistors fabricated by RF sputtering
Jun-Dar Hwang, Chung Min Chu
Topics & Concepts
HeterojunctionMaterials scienceX-ray photoelectron spectroscopyThreshold voltageOptoelectronicsSputteringSchottky barrierSaturation (graph theory)Sputter depositionSaturation currentAnalytical Chemistry (journal)TransistorVoltageNanotechnologyChemical engineeringElectrical engineeringChemistryThin filmDiodeMathematicsChromatographyCombinatoricsEngineeringZnO doping and propertiesSemiconductor materials and devicesGa2O3 and related materials