Broadband antireflective coatings in the optical communication band deposited by ion-assisted reactive magnetron sputtering
Daoming You, Yu Jiang, Yingchun Cao, Wentao Guo, Manqing Tan
Topics & Concepts
Materials scienceAnti-reflective coatingOptoelectronicsOptical coatingSputter depositionLayer (electronics)OpticsSiliconSputteringSurface roughnessReflection (computer programming)Silicon nitrideThin filmNanotechnologyComposite materialComputer sciencePhysicsProgramming languageOptical Coatings and GratingsThin-Film Transistor TechnologiesSemiconductor materials and devices