Optimization of the thermal field of 8-inch SiC crystal growth by PVT method with “3 separation heater method”
Binjie Xu, Xuefeng Han, Suocheng Xu, Deren Yang, Xiaodong Pi
Topics & Concepts
Silicon carbideMultiphysicsMaterials scienceCrystal (programming language)ThermalEnhanced Data Rates for GSM EvolutionSusceptorTemperature gradientThermal resistanceComposite materialHeat fluxField (mathematics)MechanicsOptoelectronicsHeat transferComputer scienceFinite element methodThermodynamicsStructural engineeringEngineeringMathematicsLayer (electronics)Quantum mechanicsEpitaxyPure mathematicsTelecommunicationsPhysicsProgramming languageSilicon Carbide Semiconductor TechnologiesAdvanced ceramic materials synthesisSilicon and Solar Cell Technologies