Investigation of MEMS Piezoresistive Pressure Sensor with a Freely Supported Rectangular Silicon Carbide Diaphragm as a Primary Sensing Element for Altitudinal Applications
Dadasikandar Kanekal, Sumit Kumar Jindal
Topics & Concepts
Piezoresistive effectMaterials scienceSilicon carbideMicroelectromechanical systemsFinite element methodPressure sensorDiaphragm (acoustics)SiliconDeflection (physics)Sensitivity (control systems)Composite materialMechanical engineeringOptoelectronicsStructural engineeringElectronic engineeringAcousticsVibrationOpticsEngineeringPhysicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Sensor Technologies Research