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Examining the microstructure, morphological features, and wetting characteristics of Ti/TiN/TiAlN thin films produced through RF/DC magnetron co-sputtering

Hichem Benzouid, Said Boudebane, Hana Ferkous, Fouaz Lekoui, Nafarizal Nayan, Amel Delimi, Maha Awjan Alreshidi, Muhammad Arshad, Krishna Kumar Yadav, Barbara Ernst, Noureddine Elboughdiri, Yacine Benguerba

2023Materials Today Communications18 citationsDOI

Topics & Concepts

Materials scienceMicrostructureTinSputter depositionThin filmWettingSputteringScanning electron microscopeComposite materialPulsed DCContact angleMetallurgyNanotechnologyMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsZnO doping and properties
Examining the microstructure, morphological features, and wetting characteristics of Ti/TiN/TiAlN thin films produced through RF/DC magnetron co-sputtering | Litcius