Study into grinding force in back grinding of wafer with outer rim
Xianglong Zhu, Yu Li, Zhigang Dong, Renke Kang, Shang Gao
Topics & Concepts
GrindingWaferMaterials scienceNormal forceGrinding wheelRotational speedMechanical engineeringComposite materialMechanicsEngineeringNanotechnologyPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced Machining and Optimization Techniques