Effect of La doping on dielectric constant and tetragonality of ZrO2 thin films deposited by atomic layer deposition
Juyoung Jeong, Yoogeun Han, Hyunchul Sohn
Topics & Concepts
Thin filmMaterials scienceDielectricDopingX-ray photoelectron spectroscopyAtomic layer depositionAnalytical Chemistry (journal)Tetragonal crystal systemCapacitorPulsed laser depositionHigh-κ dielectricOptoelectronicsNanotechnologyChemical engineeringChemistryCrystallographyCrystal structureElectrical engineeringVoltageChromatographyEngineeringSemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesAdvanced Memory and Neural Computing