Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS
Kristian A. Reck, Yusuf Bulut, Zhuijun Xu, Suzhe Liang, Thomas Strunskus, Benedikt Sochor, Holger Gerdes, Ralf Bandorf, Peter Müller‐Buschbaum, Stephan V. Roth, Alexander Vahl, Franz Faupel
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputter depositionSputteringCavity magnetronOptoelectronicsImpulse (physics)Thin filmNanotechnologyPhysicsQuantum mechanicsMetal and Thin Film MechanicsIon-surface interactions and analysisSemiconductor materials and devices