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Carbon Dioxide Sensor Module Based on NDIR Technology

Libing Zhou, Yaoyi He, Qing Zhang, Lei Zhang

2021Micromachines36 citationsDOIOpen Access PDF

Abstract

In this paper, a gas detection system with an environmental compensation algorithm based on nondispersive infrared (NDIR) technology was designed. The prepared infrared pyroelectric detector was a dual-channel type based on the lithium tantalate (LiTaO3) wafer. The design of the optical gas chamber adopted a combination of two ellipsoids and a spherical top surface, which not only enhanced the coupling efficiency of the light propagation but also facilitated the miniaturization of the sensor module. In addition to this, a temperature and humidity compensation algorithm based on the least square method was proposed to make the measurement accuracy up to ±0.9% full scale (FS).

Topics & Concepts

Lithium tantalateCarbon dioxide sensorMaterials sciencePyroelectricityMiniaturizationCompensation (psychology)DetectorWaferOptoelectronicsInfraredOpticsElectronic engineeringCarbon dioxideFerroelectricityDielectricLithium niobateChemistryEngineeringNanotechnologyPsychologyPsychoanalysisPhysicsOrganic chemistrySpectroscopy and Laser ApplicationsGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor Technologies
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