Thin-Film Microtensile-Test Structures for High-Throughput Characterization of Mechanical Properties
Tobias Oellers, Viswanadh Gowtham Arigela, Christoph Kirchlechner, Gerhard Dehm, Alfred Ludwig
Abstract
A photolithographic process for the rapid fabrication of thin-film tensile-test structures is presented. The process is applicable to various physical vapor deposition techniques and can be used for the combinatorial fabrication of thin-film tensile-test structure materials libraries for the high-throughput characterization of mechanical properties. The functionality of the fabrication process and the feasibility of performing high-quality measurements with these structures are demonstrated with Cu tensile-test structures. In addition, the scalability from unary structures to libraries with compositional variations is demonstrated.
Topics & Concepts
FabricationCharacterization (materials science)Ultimate tensile strengthTensile testingThroughputDeposition (geology)Unary operationThin filmChemistryNanotechnologyComposite materialMaterials scienceComputer scienceMedicinePathologyMathematicsTelecommunicationsAlternative medicineBiologyWirelessSedimentCombinatoricsPaleontologyMetal and Thin Film MechanicsCopper Interconnects and ReliabilityNanofabrication and Lithography Techniques