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RF magnetron sputtering of Ga2O3 thin films: Analysis of thermal annealing induced tuning of structural, optical characteristics, and energy band alignments

Dariskhem Pyngrope, Mandira Biswas, Shiv Kumar, Shubhankar Majumdar, Ankush Bag

2024Materials Science in Semiconductor Processing10 citationsDOI

Topics & Concepts

Scalable Vector GraphicsPhysicsMaterials scienceComputer scienceWorld Wide WebGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques
RF magnetron sputtering of Ga2O3 thin films: Analysis of thermal annealing induced tuning of structural, optical characteristics, and energy band alignments | Litcius