Design, modeling, and test of a normal-stressed electromagnetic actuated compliant nano-positioning stage
Xiangyuan Wang, Yixuan Meng, Weiwei Huang, Linlin Li, Zhiwei Zhu, Limin Zhu
Topics & Concepts
Feed forwardNatural frequencyElectromagnetic fieldDisplacement (psychology)Bandwidth (computing)Control theory (sociology)Tracking errorFrequency domainCoupling (piping)AcousticsEngineeringComputer scienceElectronic engineeringMechanical engineeringPhysicsControl engineeringVibrationControl (management)Computer visionQuantum mechanicsPsychologyArtificial intelligencePsychotherapistTelecommunicationsPiezoelectric Actuators and ControlAdvanced MEMS and NEMS TechnologiesIterative Learning Control Systems