Correlative multimodal imaging and targeted lasering for automated high-precision IC decapsulation
Nicholas May, Hongbin Choi, Adrian Phoulady, Yara Suleiman, Daniel DiMase, Pouya Tavousi, Sina Shahbazmohamadi
Topics & Concepts
WorkflowMicroelectronicsAutomationComputer scienceFemtosecondLaserIntegrated circuitCorrelativeMicroscopyComputer hardwareReal-time computingEmbedded systemMaterials scienceNanotechnologyOpticsEngineeringPhysicsMechanical engineeringLinguisticsOperating systemPhilosophyDatabaseIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography TechniquesAdvanced Surface Polishing Techniques