Litcius/Paper detail

Performance on lapping quartz glass by UV curing fixed abrasive pad with Gr2O3-diamond composite abrasives

Zhankui Wang, Pengzhan Wang, Fengsong Dong, Minghua Pang, Lijie Ma, Hongyuan Zhao, Jianxiu Su

2023Materials Science in Semiconductor Processing23 citationsDOI

Topics & Concepts

LappingMaterials scienceAbrasiveDiamondSurface roughnessQuartzGrain sizeComposite materialParticle sizeComposite numberPolishingSurface finishChemical engineeringEngineeringAdvanced Surface Polishing TechniquesTunneling and Rock MechanicsDiamond and Carbon-based Materials Research