A double-side electrically-actuated arch microbeam for pressure sensing applications
Fehmi Najar, Mehdi Ghommem, Abdessattar Abdelkefi
Topics & Concepts
MicrobeamNonlinear systemTransverse planeMechanicsBeam (structure)VibrationAcousticsMaterials sciencePhysicsOpticsEngineeringStructural engineeringQuantum mechanicsMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications