Nucleation dependence of atomic layer deposition on diamond surface termination
Jessica C. Jones, Nazar Delegan, F. Joseph Heremans, Alex B. F. Martinson
Topics & Concepts
NucleationPassivationAtomic layer depositionDiamondAnnealing (glass)Materials scienceIn situNanotechnologyDeposition (geology)Chemical engineeringLayer (electronics)Chemical physicsChemistryComposite materialOrganic chemistryPaleontologyEngineeringBiologySedimentDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesElectronic and Structural Properties of Oxides