Litcius/Paper detail

Non-alkyl tin-oxo clusters as new-type patterning materials for nanolithography

Di Wang, Xiaofeng Yi, Lei Zhang

2021Science China Chemistry40 citationsDOI

Topics & Concepts

NanolithographyAlkylResistTinMaterials scienceLigand (biochemistry)LithographyNanotechnologyChemistryOptoelectronicsFabricationLayer (electronics)Organic chemistryMedicineBiochemistryReceptorPathologyAlternative medicineMetallurgyNanofabrication and Lithography TechniquesAdvancements in Photolithography TechniquesForce Microscopy Techniques and Applications