Area-Selective Atomic Layer Deposition of Two-Dimensional WS<sub>2</sub> Nanolayers
Shashank Balasubramanyam, Marc J. M. Merkx, Marcel A. Verheijen, W. M. M. Kessels, Adriaan J. M. Mackus, Ageeth A. Bol
Abstract
. It is expected that this work will lay the foundation for area-selective ALD of other 2D materials.
Topics & Concepts
Atomic layer depositionMaterials scienceX-ray photoelectron spectroscopyNanotechnologyRaman spectroscopyThin filmNanoelectronicsNanomaterialsChemical engineeringOpticsPhysicsEngineering2D Materials and ApplicationsZnO doping and propertiesSemiconductor materials and devices