Experimental investigation of particle dispersion in cleanrooms of electronic industry under different area ratios and speeds of fan filter units
Xiaoliang Shao, Shukui Liang, Jiaan Zhao, Huan Wang, Huifang Fan, Hui Zhang, Guanpeng Cao, Xianting Li
Topics & Concepts
CleanroomAirflowDimensionless quantityVolume (thermodynamics)Particle (ecology)Environmental scienceVentilation (architecture)Environmental engineeringMechanicsMeteorologyMaterials sciencePhysicsEngineeringMechanical engineeringGeologyThermodynamicsNanotechnologyOceanographyAerosol Filtration and Electrostatic PrecipitationInfection Control and VentilationBuilding Energy and Comfort Optimization