Surface characterization and electrochemical properties of tantalum nitride (TaN) nanostructured coatings produced by reactive DC magnetron sputtering
Kazem Babaei, Arash Fattah‐alhosseini, Hassan Elmkhah, Hamid Ghomi
Topics & Concepts
Materials scienceMicrostructureCorrosionDielectric spectroscopyScanning electron microscopeCoatingSputter depositionSputteringPartial pressureTantalumNitrideMetallurgyComposite materialElectrochemistryThin filmLayer (electronics)ElectrodeNanotechnologyOrganic chemistryChemistryPhysical chemistryOxygenMetal and Thin Film MechanicsSemiconductor materials and devicesCorrosion Behavior and Inhibition