High efficiency polishing of silicon carbide by applying reactive non-aqueous fluids to fixed abrasive pads
Hanqiang Wang, Fengli Niu, Jiapeng Chen, Zhenlin Jiang, Wenjun Wang, Zhengzheng Bu, Xuehan Wang, Jun Li, Yongwei Zhu, Tao Sun
Topics & Concepts
PolishingMaterials scienceAbrasiveAqueous solutionChemical-mechanical planarizationSilicon carbideChemical engineeringX-ray photoelectron spectroscopySlurryCeramicSiliconComposite materialMetallurgyOrganic chemistryChemistryEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics