Low-temperature deuterium annealing to improve performance and reliability in a MOSFET
Ji‐Man Yu, Dong-Hyun Wang, Ja-Yun Ku, Joon‐Kyu Han, Daehan Jung, Jun-Young Park, Yang‐Kyu Choi
Topics & Concepts
Annealing (glass)MOSFETMaterials scienceDeuteriumReliability (semiconductor)Engineering physicsReliability engineeringOptoelectronicsAnalytical Chemistry (journal)MetallurgyNuclear physicsChemistryThermodynamicsElectrical engineeringEngineeringPhysicsTransistorEnvironmental chemistryPower (physics)VoltageSemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesAdvancements in Semiconductor Devices and Circuit Design