Piezoelectric properties of epitaxial Pb(Zr,Ti)O3 thin films grown on Si substrates by the sol–gel method
Goon Tan, Sang‐Hyo Kweon, Isaku Kanno
Topics & Concepts
Materials scienceEpitaxyThin filmPiezoelectricityCrystalliteSol-gelSubstrate (aquarium)SiliconComposite materialPiezoelectric coefficientOptoelectronicsAnalytical Chemistry (journal)NanotechnologyMetallurgyChemistryChromatographyLayer (electronics)OceanographyGeologyFerroelectric and Piezoelectric MaterialsAcoustic Wave Resonator TechnologiesMultiferroics and related materials