Oxygen plasma-assisted ultra-low temperature sol-gel-preparation of the PZT thin films
Han Li, Yuhao Hu, Si‐Yue Wei, Yingzhi Meng, Ningzhang Wang, Qi Zhang, Laijun Liu, Biaolin Peng
Topics & Concepts
Materials scienceAnnealing (glass)FerroelectricitySol-gelDielectricThin filmCrystallizationOxygenComposite materialPlasmaOptoelectronicsAnalytical Chemistry (journal)Chemical engineeringNanotechnologyPhysicsChromatographyEngineeringQuantum mechanicsOrganic chemistryChemistryFerroelectric and Piezoelectric MaterialsPhotorefractive and Nonlinear OpticsAcoustic Wave Resonator Technologies