Revealing the mechanisms for inactive rolling and wear behaviour on chemical mechanical planarization
Van–Thuc Nguyen, Te‐Hua Fang
Topics & Concepts
Chemical-mechanical planarizationAbrasiveMaterials sciencePolishingSlip (aerodynamics)DiamondSiliconComposite materialMetallurgyNanotechnologyPhysicsThermodynamicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications