Large-size free-standing single-crystal β-Ga<sub>2</sub>O<sub>3</sub> membranes fabricated by hydrogen implantation and lift-off
Yixiong Zheng, Zixuan Feng, A F M Anhar Uddin Bhuiyan, Lingyu Meng, Samyak Dhole, Q. X. Jia, Hongping Zhao, Jung‐Hun Seo
Abstract
This paper reports the first successful demonstration of large-size free-standing single-crystal β-Ga<sub>2</sub>O<sub>3</sub> NMs fabricated by the hydrogen implantation and lift-off process directly from MOCVD grown β-Ga<sub>2</sub>O<sub>3</sub> epifilms on native substrates.
Topics & Concepts
Materials scienceEpitaxyCrystal (programming language)DopingSubstrate (aquarium)HeterojunctionOptoelectronicsSingle crystalHydrogenLift (data mining)Band gapNanotechnologyCrystallographyLayer (electronics)Computer scienceChemistryGeologyData miningProgramming languageOrganic chemistryOceanographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques