Modelling of air damping effect on the performance of encapsulated MEMS resonators
Ankang Wang, Sahereh Sahandabadi, Tyler R. Harrison, D. F. Spicer, Mohammed Jalal Ahamed
Topics & Concepts
ResonatorFinite element methodMicroelectromechanical systemsQ factorMechanicsWork (physics)Loss factorDamping factorMagnetic dampingMaterials scienceAcousticsEnergy (signal processing)Mechanical engineeringStructural engineeringEngineeringPhysicsVibrationOptoelectronicsElectrical engineeringDielectricElectrical impedanceImpedance matchingQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies