Dark-field structured illumination microscopy for highly sensitive detection of 3D defects in optical materials
Ke Zhang, Lulu Li, Qian Liu
Topics & Concepts
OpticsMaterials scienceDark field microscopyMicroscopyDepth of fieldResolution (logic)Filter (signal processing)Optical filterSensitivity (control systems)LaserOptical powerOptical microscopeStructured lightComputer sciencePhysicsComputer visionArtificial intelligenceScanning electron microscopeEngineeringElectronic engineeringImage Processing Techniques and ApplicationsAdvanced Fluorescence Microscopy TechniquesOptical measurement and interference techniques