Piezoelectric 1D MEMS scanning micromirror fabricated with bulk PZT laminated on stainless steel plate

Hyun Chul Yoon, Suna Ju, Chang‐Hyeon Ji

2023Sensors and Actuators A Physical11 citationsDOI

Topics & Concepts

Materials scienceLead zirconate titanatePiezoelectricityMicroelectromechanical systemsCantileverLayer (electronics)ScannerSiliconComposite materialOpticsVoltageOptoelectronicsFerroelectricityDielectricElectrical engineeringPhysicsEngineeringAdvanced MEMS and NEMS TechnologiesAdvanced Surface Polishing TechniquesAdvanced Fiber Optic Sensors