Determination of frequency and voltage dependence of electrical properties of Al/(Er2O3/SiO2/n-Si)/Al MOS capacitor

Aliekber Aktağ, Alex Mutale, Ercan Yılmaz

2020Journal of Materials Science Materials in Electronics22 citationsDOI

Topics & Concepts

Materials scienceAnalytical Chemistry (journal)CapacitorEquivalent series resistanceCapacitanceConductancePhase (matter)DiffusionVoltageDopingCondensed matter physicsOptoelectronicsChemistryElectrodeElectrical engineeringPhysicsEngineeringThermodynamicsPhysical chemistryOrganic chemistryChromatographySemiconductor materials and interfacesSemiconductor materials and devicesSilicon Nanostructures and Photoluminescence