Fabrication of strontium included hafnium oxide thin film based Al/Sr:HfO<sub>2</sub>/n-Si MIS-Schottky barrier diodes for tuned electrical behavior
P. Harishsenthil, J. Chandrasekaran, D. Thangaraju, V. Balasubramani
Abstract
Synthesis of Sr included HfO 2 for fabrication of a Schottky barrier diode.
Topics & Concepts
ChemistryHafniumStrontiumFabricationStrontium oxideOptoelectronicsOxideDiodeSchottky diodeSchottky barrierThin filmNanotechnologyInorganic chemistryZirconiumPhysicsAlternative medicinePathologyMedicineMaterials scienceOrganic chemistrySemiconductor materials and devicesSemiconductor materials and interfacesFerroelectric and Negative Capacitance Devices