Effective thermo-electric-mechanical modeling of capacitively coupled plasma in low-pressure conditions: Modeling and application in dry etching
Jin-Woo Sim, Tae‐Hyun Kim, Nayoon Kang, Hae June Lee, Eun‐Ho Lee, Eun‐Ho Lee
Topics & Concepts
MechanicsPlasmaBoltzmann equationPlasma etchingMaterials scienceMechanical engineeringElectronContext (archaeology)PhysicsEngineeringEtching (microfabrication)ThermodynamicsNanotechnologyPaleontologyLayer (electronics)BiologyQuantum mechanicsPlasma Diagnostics and ApplicationsDust and Plasma Wave PhenomenaPlasma Applications and Diagnostics