Inter-diffusion, melting and reaction interplay in Ni/4H-SiC under excimer laser annealing
Salvatore Sanzaro, Corrado Bongiorno, Paolo Badalà, Anna Bassi, Giovanni Franco, Patrizia Vasquez, Alessandra Alberti, Antonino La Magna
Topics & Concepts
Materials scienceFluenceAnnealing (glass)SiliconLaserSilicideAtomic diffusionExcimer laserSilicon carbideAnalytical Chemistry (journal)Transmission electron microscopyCrystallographyMetallurgyNanotechnologyOpticsChemistryChromatographyPhysicsSilicon Carbide Semiconductor TechnologiesSemiconductor materials and interfacesThin-Film Transistor Technologies