High-quality nano structures fabrication on organic/inorganic hybrid thin films by using UV nanoimprint lithography
Ju Hwan Lee, Dong‐Hyun Kim, Jonghoon Won, Dong Wook Lee, Jin Young Oh, Yang Liu, Yong-Pil Park, Hae‐Chang Jeong, Dae‐Shik Seo
Topics & Concepts
Nanoimprint lithographyMaterials scienceNanostructureFabricationPolymerNanotechnologyThin filmLayer (electronics)Nano-Tin oxidePolyimideOptoelectronicsLithographyComposite materialDopingAlternative medicineMedicinePathologyNanofabrication and Lithography TechniquesLiquid Crystal Research AdvancementsAdvanced Materials and Mechanics