Recent progress in photolithography technique to fabricate micro-supercapacitors
Yu Xia, Xinyi Luo, Weihe Shen, Meichen Pan, Tongkun Wei, Xuan Yao, Xin Wang, Jingye Sun, Mingqiang Zhu, Tao Deng, Yang Zhao, Chang Gao
Topics & Concepts
PhotolithographySupercapacitorNanotechnologyMaterials scienceProcess engineeringEngineeringCapacitanceChemistryElectrodePhysical chemistrySupercapacitor Materials and FabricationAdvanced Sensor and Energy Harvesting MaterialsElectrospun Nanofibers in Biomedical Applications