An innovative method for preparation of sol–gel HfO2 films with high laser-induced damage threshold after high-temperature annealing
Miao Zhang, Yongqiao Zhu, Dawei Li, Peizhong Feng, Cheng Xu
Topics & Concepts
Annealing (glass)Materials scienceTransmittanceSol-gelAnalytical Chemistry (journal)Chemical engineeringOptoelectronicsNanotechnologyComposite materialChemistryChromatographyEngineeringSemiconductor materials and devicesElectronic and Structural Properties of OxidesIntegrated Circuits and Semiconductor Failure Analysis