Simultaneous damping and tracking control of a normal-stressed electromagnetic actuated nano-positioning stage
Xiangyuan Wang, Linlin Li, Zhiwei Zhu, Limin Zhu
Topics & Concepts
Control theory (sociology)Bandwidth (computing)ActuatorController (irrigation)VibrationVibration controlStiffnessControl systemDamping ratioPID controllerInner loopAccelerationStep responseEngineeringComputer sciencePhysicsControl engineeringAcousticsStructural engineeringClassical mechanicsBiologyElectrical engineeringAgronomyControl (management)Temperature controlArtificial intelligenceTelecommunicationsPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing Techniques