Litcius/Paper detail

Faceting mechanisms of GaN nanopillar under KOH wet etching

L. Jaloustre, Saron Sales De Mello, S. Labau, Camille Petit‐Etienne, E. Pargon

2024Materials Science in Semiconductor Processing14 citationsDOIOpen Access PDF

Topics & Concepts

Materials scienceNanopillarEtching (microfabrication)FacetingSurface finishNanotechnologyPlasma etchingReactive-ion etchingDry etchingNanoscopic scalePlasmaFacet (psychology)OptoelectronicsComposite materialNanostructureLayer (electronics)Condensed matter physicsPsychologySocial psychologyQuantum mechanicsPhysicsPersonalityBig Five personality traitsGaN-based semiconductor devices and materialsZnO doping and propertiesGa2O3 and related materials