Faceting mechanisms of GaN nanopillar under KOH wet etching
L. Jaloustre, Saron Sales De Mello, S. Labau, Camille Petit‐Etienne, E. Pargon
Topics & Concepts
Materials scienceNanopillarEtching (microfabrication)FacetingSurface finishNanotechnologyPlasma etchingReactive-ion etchingDry etchingNanoscopic scalePlasmaFacet (psychology)OptoelectronicsComposite materialNanostructureLayer (electronics)Condensed matter physicsPsychologySocial psychologyQuantum mechanicsPhysicsPersonalityBig Five personality traitsGaN-based semiconductor devices and materialsZnO doping and propertiesGa2O3 and related materials