Characterization of SOI MEMS capacitive accelerometer under varying acceleration shock pulse durations
Nidhi Gupta, Shankar Dutta, Yashoda Parmar, Vinita Gond, Siva Rama Krishna Vanjari, Surendra Prakash Gupta
Topics & Concepts
AccelerometerAccelerationShock (circulatory)Microelectromechanical systemsPulse (music)Rise timeCapacitive sensingPulse durationAmplitudeAcousticsMaterials scienceNoise (video)PhysicsOpticsElectrical engineeringOptoelectronicsComputer scienceEngineeringVoltageLaserClassical mechanicsMedicineImage (mathematics)Internal medicineDetectorQuantum mechanicsArtificial intelligenceAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies