Six-degree-of-freedom geometrical errors measurement system with compensation of laser beam drifts and installation errors for linear stage
Chi-Chen Lo, Wen-Huai Hsu, Chien-Sheng Liu
Topics & Concepts
InterferometryComputer scienceCompensation (psychology)Position (finance)Measure (data warehouse)OpticsSensitivity (control systems)Observational errorLaserBeam (structure)Geometrical opticsAlgorithmPhysicsElectronic engineeringMathematicsPsychologyEconomicsStatisticsDatabaseEngineeringFinancePsychoanalysisAdvanced Measurement and Metrology TechniquesAdvanced Numerical Analysis TechniquesOptical measurement and interference techniques