Micro-Raman investigation of p-type B doped Si(1 0 0) revisited
Stefano Palleschi, Dario Mastrippolito, P. Benassi, M. Nardone, L. Ottaviano
Topics & Concepts
Raman spectroscopyMaterials scienceDopingAnalytical Chemistry (journal)LaserExcitationWaferCoherent anti-Stokes Raman spectroscopyDopantSpectroscopySiliconMolecular physicsOpticsOptoelectronicsRaman scatteringChemistryPhysicsChromatographyQuantum mechanicsSilicon Nanostructures and PhotoluminescenceSilicon and Solar Cell TechnologiesIon-surface interactions and analysis