A piezoelectric AlN MEMS hydrophone with high sensitivity and low noise density
Dengfei Yang, Lei Yang, Xuying Chen, Mengjiao Qu, Ke Zhu, Hong Ding, Dongsheng Li, Yun Bai, Ling Jian, Jinghui Xu, Jin Xie
Topics & Concepts
HydrophoneAcousticsSensitivity (control systems)Materials scienceNoise (video)PiezoelectricityMicroelectromechanical systemsBandwidth (computing)Electronic engineeringOptoelectronicsEngineeringComputer sciencePhysicsTelecommunicationsImage (mathematics)Artificial intelligenceAcoustic Wave Resonator TechnologiesUnderwater Acoustics ResearchUltrasonics and Acoustic Wave Propagation